In recent years, by use of the characters including high-penetration ability of ga in sio2, small diffusion stress in si, large diffusion efficiency and large solid-solubility, open-tube ga-diffusion technology in sio2 / si system was realized 近年來,巧妙地利用ga具有強穿透sio_2的能力,在si中具有擴散應力小、擴散系數大、固溶度較大等特點,實現了開管sio_2si系下的擴散。
With the development of doping technology, the formation of the base region in high-voltage transistor can be made by b diffusion technology, b-a1 paste-layer diffusion technology, close-tube ga-diffusion technology and open-tube gallium-diffusion technology 隨著摻雜工藝的不斷發展,高反壓晶體管基區的形成經歷了擴硼工藝、硼鋁涂層擴散工藝、閉管擴鎵工藝到開管擴鎵工藝的發展。
With the development of doping technology, the formation of the base region in high-voltage transistor can be made by b diffusion technology, b-a1 paste-layer diffusion technology, close-tube ga-diffusion technology and open-tube gallium-diffusion technology 隨著摻雜工藝的不斷發展,高反壓晶體管基區的形成經歷了擴硼工藝、硼鋁涂層擴散工藝、閉管擴鎵工藝到開管擴鎵工藝的發展。
With the development of doping technology, the formation of the base region in high-voltage transistor can be made by b diffusion technology, b-a1 paste-layer diffusion technology, close-tube ga-diffusion technology and open-tube gallium-diffusion technology 隨著摻雜工藝的不斷發展,高反壓晶體管基區的形成經歷了擴硼工藝、硼鋁涂層擴散工藝、閉管擴鎵工藝到開管擴鎵工藝的發展。
With the development of doping technology, the formation of the base region in high-voltage transistor can be made by b diffusion technology, b-a1 paste-layer diffusion technology, close-tube ga-diffusion technology and open-tube gallium-diffusion technology 隨著摻雜工藝的不斷發展,高反壓晶體管基區的形成經歷了擴硼工藝、硼鋁涂層擴散工藝、閉管擴鎵工藝到開管擴鎵工藝的發展。
At the initial stage of planar technique, b was employed as ideal diffusion impurity in base-region of npn si planar devices because of the match of its solid-solubility and diffusion coefficient in si with those of p in emission-region, and the good shield effect of sio2 film to b . but because of the relatively large solubility ( 5 1020 / cm3 at 1000 ) and the small diffusion coefficient, the linear slowly-changed distribution of acceptor b in pn junction can not be formed, which could not cater to the requirement of high-reversal-voltage devics . thereafter b-a1 paste-layer diffusion technology and close-tube ga-diffusion technology had been developed, while the former can lead to relatively large the base-region deviation and abruptly varied region in si, which caused severe decentralization of current amplification parameter, bad thermal stability and high tr; the latter needed the relatively difficult pack technique, with poor repeatability, high rejection ratio, and poor diffusion quality and productio n efficiency 在平面工藝初期,由于b在硅中的固溶度、擴散系數與n型發射區的磷相匹配,sio_2對其又有良好的掩蔽作用,早被選為npn硅平面器件的理想基區擴散源,但b在硅中的固溶度大(1000時達到510~(20),擴散系數小,b在硅中的雜質分布不易形成pn結中雜質的線性緩變分布,導致器件不能滿足高反壓的要求,隨之又出現了硼鋁涂層擴散工藝和閉管擴鎵工藝,前者會引起較大的基區偏差,雜質在硅內存在突變區域,導致放大系數分散嚴重,下降時間t_f值較高,熱穩定性差;后者需要難度較大的真空封管技術,工藝重復性差,報廢率高,在擴散質量、生產效率諸方面均不能令人滿意。
At the initial stage of planar technique, b was employed as ideal diffusion impurity in base-region of npn si planar devices because of the match of its solid-solubility and diffusion coefficient in si with those of p in emission-region, and the good shield effect of sio2 film to b . but because of the relatively large solubility ( 5 1020 / cm3 at 1000 ) and the small diffusion coefficient, the linear slowly-changed distribution of acceptor b in pn junction can not be formed, which could not cater to the requirement of high-reversal-voltage devics . thereafter b-a1 paste-layer diffusion technology and close-tube ga-diffusion technology had been developed, while the former can lead to relatively large the base-region deviation and abruptly varied region in si, which caused severe decentralization of current amplification parameter, bad thermal stability and high tr; the latter needed the relatively difficult pack technique, with poor repeatability, high rejection ratio, and poor diffusion quality and productio n efficiency 在平面工藝初期,由于b在硅中的固溶度、擴散系數與n型發射區的磷相匹配,sio_2對其又有良好的掩蔽作用,早被選為npn硅平面器件的理想基區擴散源,但b在硅中的固溶度大(1000時達到510~(20),擴散系數小,b在硅中的雜質分布不易形成pn結中雜質的線性緩變分布,導致器件不能滿足高反壓的要求,隨之又出現了硼鋁涂層擴散工藝和閉管擴鎵工藝,前者會引起較大的基區偏差,雜質在硅內存在突變區域,導致放大系數分散嚴重,下降時間t_f值較高,熱穩定性差;后者需要難度較大的真空封管技術,工藝重復性差,報廢率高,在擴散質量、生產效率諸方面均不能令人滿意。